A COMPACT STABILIZATION SCHEME FOR QUALITY FACTOR IN NONDEGENERATE MEMS GYROSCOPE

被引：0

作者：

Zhao, Yang ^{[1
]}

Shi, Qin ^{[1
]}

Xia, Guoming ^{[1
]}

Qiu, Anping ^{[1
]}

机构：

[1] Nanjing Univ Sci & Technol, Nanjing, Peoples R China

来源：

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) | 2022年

基金：

中国国家自然科学基金;

关键词：

nondegenerate MEMS gyroscope; quality factor stabilization; thermoelastic dissipation; resistive loading;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a compact Q-factor stabilization scheme utilizing resistive loading effect in nondegenerate MEMS gyroscope. The ratio of thermoelastic dissipation (TED) to air damping in gyroscope sense dynamic is carefully designed to form a Q-factor proportional to 1/T, and an HRI resistor with negative temperature coefficient (TCO) is integrated on readout IC to damp the sensing Q-factor and compensate its thermal variation with a proper polarization voltage. No temperature to voltage feedback loop or dedicated electrode is needed in the proposed scheme. The Q-factor thermal variation reduces from 56.4% to 0.1% with a temperature range from -40 degrees C to +60 degrees C.

引用

页码：146 / 149

页数：4

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