Cutting of Diamond Substrate Using Fixed Diamond Grain Saw Wire

被引:2
|
作者
Kamiya, Osamu [1 ]
Takahashi, Mamoru [1 ]
Miyano, Yasuyuki [1 ]
Ito, Shinichi [1 ]
Nakatsu, Masanobu [2 ]
Mizuma, Hiroyuki [2 ]
Iwama, Yuichi [2 ]
Murata, Kenji [3 ]
Nanao, Junpei [3 ]
Kawano, Makoto [3 ]
Maisawa, Arata [3 ]
Kazumi, Takashi [3 ]
机构
[1] Akita Univ, Fac Engn Sci, Dept Syst Design Engn, Akita 0108502, Japan
[2] SANWA TEKKI Corp, Shinagawa Ku, 6-4-6 Minami Shinagawa, Tokyo 1408669, Japan
[3] Nippon Koki Co Ltd, Res & Dev Dept, Shirakawa 9618686, Japan
关键词
diamond cutting; diamond saw wire; fixed grain saw wire; diamond grain; cutting length;
D O I
10.3390/ma15165524
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This study demonstrates that a single-crystal diamond substrate can be cut along designed lines using the diamond-saw-wire cutting method. We developed an original saw-wire fixed diamond-grain using a bronze solder with a high melting temperature. We created a unique product machine system with a high vacuum furnace and a bronze solder that contains a metallic compound. The diamond cutting mechanism employed in this study is based on the mild wear phenomenon, owing to the friction between the diamond surfaces. A linear relationship between the cutting length and wire feed distance was observed. The relationship can be approximated as y = 0.3622x, where y (mu m) is the cutting depth and x (km) is the wire feed distance. The life of the saw-wire was longer than that of the 6000 km wire feed distance and was tested by reciprocating an 8-m short wire at a speed, tension, and cutting force of 150 m/min, 1 N, and 0.2 N, respectively. A single crystal diamond substrate could be cut along the designed line, which was more than 2 mm long. The cutting speed was maintained constant at 0.36 mu m/km.
引用
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页数:11
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