Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection

被引：3

作者：

Li, Xiaojie ^{[1
]}

Duan, Xiaojie ^{[1
]}

Li, Guangxu ^{[1
]}

Cao, Teng ^{[1
]}

Xie, Rui ^{[1
]}

Hong, Yanhua ^{[2
]}

Tang, Chunxiao ^{[1
]}

Li, Enbang ^{[3
]}

Zhang, Cheng ^{[1
]}

Li, Hongqiang ^{[1
]}

机构：

[1] Tianjin Polytech Univ, Sch Elect & Informat Engn, Tianjin Key Lab Optoelect Detect Technol & Syst, Tianjin, Peoples R China

[2] Bangor Univ, Sch Elect Engn, Bangor, Gwynedd, Wales

[3] Univ Wollongong, Sch Phys, Wollongong, NSW, Australia

来源：

OPTICAL ENGINEERING | 2018年 / 57卷 / 09期

基金：

中国国家自然科学基金;

关键词：

fiber-optic interference; three-dimensional shape; small object; PHASE-MODULATING INTERFEROMETRY; MEASURING PROFILOMETRY; SHAPE MEASUREMENT; SYSTEM;

D O I：

10.1117/1.OE.57.9.094105

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We used a system that exploits the Mach-Zehnder interferometer structure and Young's double-pinhole interference principle to measure the three-dimensional topographies of small objects at high precision. Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 x 10-cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)

引用

页数：9

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