Development of interference filters based on multilayer porous silicon structures

被引:17
|
作者
Torres-Costa, V
Gago, R
Martín-Palma, RJ
Vinnichenko, M
Grötzschel, R
Martínez-Duart, JM
机构
[1] Univ Autonoma Madrid, Dept Fis Aplicada, E-28049 Madrid, Spain
[2] Forschungszentrum Rossendorf EV, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
关键词
porous silicon; multilayer; interference filter;
D O I
10.1016/j.msec.2003.09.110
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Porous silicon (PS) has a great potential in optical applications due to its tuneable refractive index. In particular, multilayer structures consisting of alternating PS layers with different refractive indices can be used as interference filters for applications in the field of optoelectronics and sensors. In the present work, the optical properties of PS single layers and multilayer structures were studied. Since the refractive index of PS varies depending on the air content of the porous matrix, the PS structures were modelled as an homogeneous mixture of silicon and air, according to the effective medium theories (EMTs). By adjusting the refractive index and thickness of each individual layer, we can obtain a stack of PS layers with the desired optical properties, resulting in interference filters of predetermined bandwidth. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:1043 / 1046
页数:4
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