Development of Electrothermal MEMS Mirror for Low Voltage Micro Optical Diffusion Sensor

被引：0
|
作者：
Kiuchi, Yuki [1 ]
Taguchi, Yoshihiro [2 ]
Nagasaka, Yuji [2 ]
机构：
[1] Keio Univ, Sch Integrated Design Engn, Yokohama, Kanagawa, Japan
[2] Keio Univ, Dept Syst Design Engn, Yokohama, Kanagawa, Japan
来源：
2015 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2015年
关键词：
Deformation; Electrothermal actuation; MEMS mirror; Thermal expansion;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：2
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