共 50 条
- [21] A MICRO-ROTARY ACTUATOR USING SHAPE MEMORY ALLOYS SENSORS AND ACTUATORS, 1988, 15 (01): : 95 - 102
- [23] Control of Residual Vibration in Micro-positioning Platform ADVANCED POLYMER SCIENCE AND ENGINEERING, 2011, 221 : 444 - 448
- [25] Design of flexure-based modular architecture micro-positioning stage Microsystem Technologies, 2020, 26 : 2893 - 2901
- [26] Research on modelling of piezoelectric micro-positioning stage based on PI hysteresis model JOURNAL OF ENGINEERING-JOE, 2019, (13): : 437 - 441
- [27] Design of flexure-based modular architecture micro-positioning stage MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2020, 26 (09): : 2893 - 2901
- [28] Design and Control of a Decoupled Micro-positioning Stage Using Corrugated Flexure Units 2019 9TH IEEE ANNUAL INTERNATIONAL CONFERENCE ON CYBER TECHNOLOGY IN AUTOMATION, CONTROL, AND INTELLIGENT SYSTEMS (IEEE-CYBER 2019), 2019, : 1038 - 1043