Development and Validation of FEM Models for a 6-axis Single Mass Piezoelectric Motion Sensor

In this paper, a 6-axis piezoelectric Inertial Measurement Unit (IMU) is being analyzed. The aim is to validate a new FEM model through simulations using published experimental results. The motion detection system under study has been previously developed and tested by a Japanese research group. We present the detection principle of the single mass piezoelectric IMU system. Then, we investigate the simultaneous detection of six-axis motion components. The 3-axis acceleration detection focuses on the use of the direct piezoelectric effect. Whereas, the angular velocity detection method is based on the Coriolis Effect which requires a certain excitation to produce an oscillation motion of the suspended mass. To be able to compare results and validate our FEM model, we have examined both possible oscillating planes X-Y and X-Z as has been done by the other group. Results found from FEM simulations are in good agreement with reported experimental values. Maximum error found is 12% in x-axis acceleration values. Sensitivity is found to be approximately the same with a value of 2.6 mV/deg/sec.