High-temperature behavior of housed piezoelectric resonators based on CTGS

被引:3
|
作者
Schulz, Michal [1 ]
Ghanavati, Rezvan [1 ]
Kohler, Fabian [2 ]
Wilde, Jurgen [2 ]
Fritze, Holger [1 ]
机构
[1] Tech Univ Clausthal, Inst Energy Res & Phys Technol, Goslar, Germany
[2] Univ Freiburg, Dept Microsyst Engn IMTEK, Freiburg, Germany
关键词
ELECTROMECHANICAL PROPERTIES; SINGLE-CRYSTAL; CONDUCTIVITY; TRANSPORT;
D O I
10.5194/jsss-10-271-2021
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A temperature sensor based on piezoelectric single crystals allowing stable operation in harsh environments such as extreme temperatures and highly reducing or oxidizing atmospheres is presented. The temperature dependence of the mechanical stiffness of thickness shear mode resonators is used to determine temperature changes. The sensor is based on catangasite (Ca3TaGa3Si2O14 - CTGS), a member of a langasite crystal family. CTGS exhibits an ordered crystal structure and low acoustic losses, even at 1000 degrees C. The resonance frequency and quality factor of unhoused and of housed CTGS resonators are measured up to about 1030 degrees C. A temperature coefficient of the resonance frequency of about 200 Hz K-1 for a 5 MHz device is found and enables determination of temperature changes as small as 0.04 K. Housed CTGS resonators do not show any significant change in the resonance behavior during a 30 d, long-term test at 711 degrees C.
引用
收藏
页码:271 / 279
页数:9
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