High-temperature behavior of housed piezoelectric resonators based on CTGS

被引:3
|
作者
Schulz, Michal [1 ]
Ghanavati, Rezvan [1 ]
Kohler, Fabian [2 ]
Wilde, Jurgen [2 ]
Fritze, Holger [1 ]
机构
[1] Tech Univ Clausthal, Inst Energy Res & Phys Technol, Goslar, Germany
[2] Univ Freiburg, Dept Microsyst Engn IMTEK, Freiburg, Germany
关键词
ELECTROMECHANICAL PROPERTIES; SINGLE-CRYSTAL; CONDUCTIVITY; TRANSPORT;
D O I
10.5194/jsss-10-271-2021
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A temperature sensor based on piezoelectric single crystals allowing stable operation in harsh environments such as extreme temperatures and highly reducing or oxidizing atmospheres is presented. The temperature dependence of the mechanical stiffness of thickness shear mode resonators is used to determine temperature changes. The sensor is based on catangasite (Ca3TaGa3Si2O14 - CTGS), a member of a langasite crystal family. CTGS exhibits an ordered crystal structure and low acoustic losses, even at 1000 degrees C. The resonance frequency and quality factor of unhoused and of housed CTGS resonators are measured up to about 1030 degrees C. A temperature coefficient of the resonance frequency of about 200 Hz K-1 for a 5 MHz device is found and enables determination of temperature changes as small as 0.04 K. Housed CTGS resonators do not show any significant change in the resonance behavior during a 30 d, long-term test at 711 degrees C.
引用
收藏
页码:271 / 279
页数:9
相关论文
共 50 条
  • [1] Electromechanical properties of housed piezoelectric CTGS resonators at high temperatures - Modeling of housing influence
    Schulz, Michal
    Ghanavati, Rezvan
    Kohler, Fabian
    Wilde, Juergen
    Fritze, Holger
    TM-TECHNISCHES MESSEN, 2022, 89 (12) : 875 - 883
  • [2] High Temperature Behavior of RuAl Thin Films on Piezoelectric CTGS and LGS Substrates
    Seifert, Marietta
    MATERIALS, 2020, 13 (07) : 1 - 20
  • [3] Shear Horizontal Guided Wave Sensors Based on CTGS Piezoelectric Crystal for High-Temperature Structural Health Monitoring
    Wang, Guoliang
    Hou, Shuai
    Xie, Linfang
    Peng, Xiangkang
    Li, Yanlu
    Zhao, Xian
    Zhang, Shujun
    Jiang, Xiaoning
    Yu, Fapeng
    ADVANCED ELECTRONIC MATERIALS, 2024, 10 (07)
  • [4] Study of TiAl thin films on piezoelectric CTGS substrates as an alternative metallization system for high-temperature SAW devices
    Seifert, Marietta
    Lattner, Eric
    Menzel, Siegfried B.
    Oswald, Steffen
    Gemming, Thomas
    JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T, 2021, 12 : 2383 - 2395
  • [5] HIGH-TEMPERATURE SUPERCONDUCTING RESONATORS
    TABER, RC
    HOLLENHORST, JN
    CUTLER, LS
    BAGWELL, TL
    NEWMAN, N
    COLE, BF
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1992, 39 (03) : 398 - 404
  • [6] High-Temperature Piezoelectric Sensing
    Jiang, Xiaoning
    Kim, Kyungrim
    Zhang, Shujun
    Johnson, Joseph
    Salazar, Giovanni
    SENSORS, 2014, 14 (01): : 144 - 169
  • [7] High-Temperature and High-Sensitivity Pressure Sensors Based on Microwave Resonators
    Zhu, Chen
    Tang, Yan
    Guo, Jing
    Gerald, Rex E., II
    Huang, Jie
    IEEE SENSORS JOURNAL, 2021, 21 (17) : 18781 - 18792
  • [8] High-temperature piezoelectric crystals and devices
    Holger Fritze
    Journal of Electroceramics, 2011, 26 : 122 - 161
  • [9] PIEZOELECTRIC CERAMICS FOR HIGH-TEMPERATURE TRANSDUCERS
    KORZUNOVA, L
    FERROELECTRICS, 1992, 134 (1-4) : 175 - 180
  • [10] High-temperature piezoelectric crystals and devices
    Fritze, Holger
    JOURNAL OF ELECTROCERAMICS, 2011, 26 (1-4) : 122 - 161