Recent advances in SWIR MEMS-based tunable Fabry-Perot microspectrometers

被引：1
|
作者：
Antoszewski, J. [1 ]
Nguyen, T. [1 ]
Martyniuk, M. [1 ]
Dell, J. M. [1 ]
Faraone, L. [1 ]
机构：
[1] Univ Western Australia, Sch Elect Elect & Comp Engn, Crawley, WA 6009, Australia
来源：
INFRARED TECHNOLOGY AND APPLICATIONS XXXVII | 2011年 / 8012卷
关键词：
Infrared detectors; tunable infrared detectors; MEMS; Fabry-Perot filters; FILTER;
D O I：
10.1117/12.883734
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recent progress in short wavelength infrared MEMS based Fabry-Perot microspectrometers at The University of Western Australia is presented. The original monolithic approach has been replaced with a hybrid one due to HgCdTe restricting the thermal budget and affecting the quality of structural silicon nitride films. The spectral resolution has been improved by introducing five layer Bragg mirrors and by limiting the electrostatically actuated top mirror bowing and tilting using stress balancing between layers. In effect the FWHM has been reduced to 30nm at similar to 2.0 mu m in comparison to the ideal theoretical mid-range value of 9nm. Analysis of mirror profiles shows that this difference is a result of remaining mirror imperfections.
引用
收藏
页数：6
相关论文
共 50 条
  • [21] Simultaneous wavelength and orbital angular momentum demultiplexing using tunable MEMS-based Fabry-Perot filter
    Lyubopytov, Vladimir S.
    Porfirev, Alexey P.
    Gurbatov, Stanislav O.
    Paul, Sujoy
    Schumann, Martin F.
    Cesar, Julijan
    Malekizandi, Mohammadreza
    Haidar, Mohammad T.
    Wegener, Martin
    Chipouline, Arkadi
    Kueppers, Franko
    OPTICS EXPRESS, 2017, 25 (09): : 9634 - 9646
  • [22] MEMS Tunable Metasurfaces Based on Gap Plasmon or Fabry-Perot Resonances
    Thrane, Paul C. V.
    Meng, Chao
    Ding, Fei
    Bozhevolnyi, Sergey I.
    NANO LETTERS, 2022, 22 (17) : 6951 - 6957
  • [23] Advances in Fabry-Perot and Tunable Quantum Cascade Lasers
    Patel, C. Kumar N.
    MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS IX, 2017, 10194
  • [24] Towards MEMS-based Long-wavelength Infrared Tuneable Fabry-Perot Filters
    Mao, Haifeng
    Martyniuk, Mariusz
    Silva, Dilusha
    Antoszewski, Jarek
    Bumgarner, John
    Faraone, Lorenzo
    2014 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAD 2014), 2014, : 149 - 152
  • [25] NEXT GENERATION OF HIGHLY MINIATURIZED BULK-MEMS FABRY-PEROT FILTERS FOR INFRARED MICROSPECTROMETERS
    Ebermann, Martin
    Neumann, Norbert
    Hoppe, Silke
    Hiller, Karla
    Seiler, Jan
    Helke, Christian
    Meinig, Marco
    Kurth, Steffen
    2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 470 - 473
  • [26] MEMS-based microspectrometers for infrared sensing
    Musca, C. A.
    Antoszewski, J.
    Keating, A. J.
    Winchester, K. J.
    Silva, K. K. M. B. D.
    Nguyen, T.
    Dell, J. M.
    Faraone, L.
    2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2007, : 137 - 138
  • [27] MEMS Fabry-Perot pixels
    Toshiyoshi, Hiroshi
    Lo, Chengyao
    Taii, Yusuke
    Fujita, Hiroyuki
    2007 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2007, : 284 - 285
  • [28] MEMS-Based High-Sensitivity Fabry-Perot Acoustic Sensor With a 45° Angled Fiber
    Liu, Bin
    Lin, Jie
    Wang, Jian
    Ye, Chen
    Jin, Peng
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2016, 28 (05) : 581 - 584
  • [29] TUNABLE FABRY-PEROT FILTERS
    ATHERTON, PD
    REAY, NK
    RING, J
    HICKS, TR
    OPTICAL ENGINEERING, 1981, 20 (06) : 806 - 814
  • [30] A novel approach based on simulation of tunable MEMS diaphragm for extrinsic Fabry-Perot sensors
    Hayber, Sekip Esat
    Tabaru, Timucin Emre
    Saracoglu, Omer Galip
    OPTICS COMMUNICATIONS, 2019, 430 (14-23) : 14 - 23
12345