Recent advances in SWIR MEMS-based tunable Fabry-Perot microspectrometers

被引：1
|
作者：
Antoszewski, J. [1 ]
Nguyen, T. [1 ]
Martyniuk, M. [1 ]
Dell, J. M. [1 ]
Faraone, L. [1 ]
机构：
[1] Univ Western Australia, Sch Elect Elect & Comp Engn, Crawley, WA 6009, Australia
来源：
INFRARED TECHNOLOGY AND APPLICATIONS XXXVII | 2011年 / 8012卷
关键词：
Infrared detectors; tunable infrared detectors; MEMS; Fabry-Perot filters; FILTER;
D O I：
10.1117/12.883734
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recent progress in short wavelength infrared MEMS based Fabry-Perot microspectrometers at The University of Western Australia is presented. The original monolithic approach has been replaced with a hybrid one due to HgCdTe restricting the thermal budget and affecting the quality of structural silicon nitride films. The spectral resolution has been improved by introducing five layer Bragg mirrors and by limiting the electrostatically actuated top mirror bowing and tilting using stress balancing between layers. In effect the FWHM has been reduced to 30nm at similar to 2.0 mu m in comparison to the ideal theoretical mid-range value of 9nm. Analysis of mirror profiles shows that this difference is a result of remaining mirror imperfections.
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页数：6
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