A RESONANT PRESSURE MICRO SENSOR BASED ON SUSPENDED ASSEMBLY

被引：0

作者：

Lu, Yulan ^{[1
,2
]}

Xie, Bo ^{[1
]}

Li, Yadong ^{[1
,2
]}

Chen, Deyong ^{[1
,2
]}

Wang, Junbo ^{[1
,2
]}

Chen, Jian ^{[1
]}

Wei, Hua ^{[1
]}

Zhang, Guoqing ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Elect, Beijing, Peoples R China

[2] Univ Chinese Acad Sci, Beijing, Peoples R China

来源：

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年

基金：

中国国家自然科学基金;

关键词：

Resonant pressure micro sensor; suspended assembly; temperature variation; environmental vibration; frequency shift;

D O I：

10.1109/transducers.2019.8808498

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study presents a resonant pressure micro sensor which is suspended by springs in assembly. Pressures under measurement lead to intrinsic frequency shifts of two resonators, which are, however, prone to environmental disturbances. The suspended assembly proposed in this study can minimize the side effects of environmental noises and stabilize intrinsic frequencies of resonators. More specifically, in response to temperature variations, the fitting errors of the resonant pressure micro sensors with and without suspended assembly were quantified as -13 Pa and 788 Pa, respectively. In response to environmental vibrations, the measurement errors of the resonant pressure micro sensors were decreased from 24 Pa to 6 Pa with the help of the suspended assembly.

引用

页码：1736 / 1739

页数：4

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