ISFET sensor coupled with CMOS read-out circuit microsystem

被引：19
|
作者：
Ravezzi, L
Conci, P
机构：
[1] Univ Trent, Dipartimento Ingn Mat, I-38050 Trent, Italy
[2] IRST, Div Microsensori & Integraz Sistema, Loc Pante Povo, I-38050 Trent, Italy
来源：
ELECTRONICS LETTERS | 1998年 / 34卷 / 23期
关键词：
D O I：
10.1049/el:19981532
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The development of a prototype microsystem for measuring the pH, i.e. H+ ion concentration, of an aqueous electrolytic solution is described which has a resolution higher than 1/20 of pH. The microsystem is composed of an ion sensitive field effect transistor (ISFET) sensor coupled with a CMOS read-out channel capable of providing a low-impedance analogue output and protection against electrostatic discharges. The silicon integrated ISFET sensor chip and the CMOS read-out chip have been fabricated, packaged and successfully tested at the IRST-Microsystem Division of Trento (Italy) using the internal microfabrication facility.
引用
收藏
页码：2234 / 2235
页数：2
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