New physical analysis capability for counterfeit electronics and reverse engineering

被引:1
|
作者
Johnson, Greg M. [1 ]
Hartfield, Cheryl [2 ]
Mueller, Sascha [3 ]
Kaestner, Marcus [3 ]
机构
[1] ZEISS Res Microscopy Solut, Peabody, MA 01960 USA
[2] ZEISS SMT, Proc Control Solut, Pleasanton, CA USA
[3] ZEISS SMT, Proc Control Solut, Oberkochen, Germany
关键词
FIB-SEM; laser; sample preparation; counterfeit; cybersecurity;
D O I
10.1109/PAINE49178.2020.9337737
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
a new cross-section workflow for improved access to buried structures within electronic devices has been developed. A focused-ion beam scanning-electron microscope (FIB-SEM) system has been integrated by attaching a femtosecond laser to the loadlock chamber, enabling rapid site-specific preparation of internal device details. Evidence is provided that compared with traditional techniques, this new workflow enabled by the Crossbeam laser FIB-SEM offers improved speed and productivity, while simultaneously delivering more precise dimensional sampling and reduced damage to the surrounding area.
引用
收藏
页数:5
相关论文
共 50 条
  • [31] ELECTRONICS AND RADIO ENGINEERING DISCRETE SCANNING DEVICE FOR AUTOMATION OF PHYSICAL RESEARCH
    KOLOSOV, SS
    LEONOV, YI
    LITVINEN.LN
    PRIBORY I TEKHNIKA EKSPERIMENTA, 1974, (05): : 58 - 60
  • [33] A NEW COURSE ON PRODUCT DEVELOPMENT FOR ELECTRONICS ENGINEERING TECHNOLOGY
    Morgan, Joseph A.
    Porter, Jay R.
    Zhan, Wei
    2013 ASEE ANNUAL CONFERENCE, 2013,
  • [34] Physical and Functional Reverse Engineering Challenges for Advanced Semiconductor Solutions
    Lippmann, Bernhard
    Bette, Ann-Christin
    Ludwig, Matthias
    Mutter, Johannes
    Baehr, Johanna
    Hepp, Alexander
    Gieser, Horst
    Kovac, Nicola
    Zweifel, Tobias
    Rasche, Martin
    Kellermann, Oliver
    Proceedings of the 2022 Design, Automation and Test in Europe Conference and Exhibition, DATE 2022, 2022, : 796 - 801
  • [35] A New Algorithm for Feature Matching in Reverse Engineering
    Zhu, Gensong
    Zhou, Tianrui
    Zhou, Jie
    Tsinghua Science and Technology, 2009, 14 (SUPPL. 1): : 43 - 46
  • [36] Physical and Functional Reverse Engineering Challenges for Advanced Semiconductor Solutions
    Lippmann, Bernhard
    Bette, Ann-Christin
    Ludwig, Matthias
    Mutter, Johannes
    Baehr, Johanna
    Hepp, Alexander
    Gieser, Horst
    Kovac, Nicola
    Zweifel, Tobias
    Rasche, Martin
    Kellermann, Oliver
    PROCEEDINGS OF THE 2022 DESIGN, AUTOMATION & TEST IN EUROPE CONFERENCE & EXHIBITION (DATE 2022), 2022, : 796 - 801
  • [37] Reverse engineering strategy for new targets identification
    Xie, Bin
    Zhang, Taimei
    Li, Le
    Chen, Hongkui
    Liu, Yang
    Bi, Lintao
    Wen, Danyi
    CANCER RESEARCH, 2024, 84 (06)
  • [38] A New Algorithm for Feature Matching in Reverse Engineering
    朱根松
    周天瑞
    周捷
    TsinghuaScienceandTechnology, 2009, 14(S1) (S1) : 43 - 46
  • [39] A new method of reverse engineering for an automation process
    Bliedtner, J.
    Schwartze, S.
    Annals of DAAAM for 2003 & Proceedings of the 14th International DAAAM Symposium: INTELLIGENT MANUFACTURING & AUTOMATION: FOCUS ON RECONSTRUCTION AND DEVELOPMENT, 2003, : 49 - 50
  • [40] Functional Electronic Clones - the most dangerous NEW counterfeit threat facing the ENTIRE Electronics Industry today
    Sharpe, Thomas
    ISTFA 2015: CONFERENCE PROCEEDINGS FROM THE 41ST INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS, 2015, : 177 - 178