The thermoelectric-photoelectric integrated power generator and its design verification

This paper introduces the integrated generator and its design verification. In order to analyze the output performance of the thermoelectric generator, the design verification is carried out using ANSYS finite element simulation. In the simulation of traditional thermocouple structure, the maximum power factor is 8.99 x 10(-3) mu Wcm(-2)K(-2). In the simulation of I-shaped thermocouple structure, the maximum power factor is 11.39 x 10(-3) mu Wcm(-2)K(-2). It verifies that compare with the traditional thermocouple, the I-shaped thermocouple can increase the maximum power factor. The thermoelectric-photoelectric integrated generator is fabricated by one multi-step MEMS process. The bottom of integrated generator is the light energy collector. The top of integrated generator is the thermal energy collector. Polyimide is coated on the upper end of the thermopile to make the heat transfer smoothly. It also make the temperature difference between the front side and back side larger. In the experiment, the thermoelectric and photoelectric properties of the generator are tested at room temperature. The maximum power factor of the generator is 7.81 x 10(-3) mu Wcm(-2)K(-2). The photoelectric efficiency is 7.58%. The I-shaped thermocouple structure reduces contact resistance and increases the maximum power factor of the thermoelectricity. In practical use, this generator can power portable sensors.