共 50 条
- [1] Sub-20 nm scratch nanolithography for Si using scanning probe microscopy JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (10A): : 6908 - 6910
- [2] Strongly Phase-Segregating Block Copolymers with Sub-20 nm Features ACS MACRO LETTERS, 2013, 2 (08): : 677 - 682
- [5] Sub-20 nm x-ray nanolithography using conventional mask technologies on monochromatized synchrotron radiation JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2489 - 2494
- [6] Controlled self-assembly of block copolymers in printed sub-20 nm cross-bar structures NANOSCALE ADVANCES, 2021, 3 (17): : 5083 - 5089
- [7] Defect mitigation in sub-20 nm patterning with high-chi, silicon-containing block copolymers ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXVI, 2019, 10960
- [9] Nanoscale neuroelectrode modification via sub-20 nm silicon nanowires through self-assembly of block copolymers Journal of Materials Science: Materials in Medicine, 2015, 26
- [10] Device characteristics of sub-20 nm silicon nanotransistors DESIGN AND PROCESS INTEGRATION FOR MICROELECTRONIC MANUFACTURING, 2003, : 172 - 179