Applications of Carbon Nanotubes Grown by Chemical Vapor Deposition

被引：42
|
作者：
Robertson, John [1 ]
Zhong, Guofang [1 ]
Esconjauregui, C. Santiago [1 ]
Bayer, Bernhard C. [1 ]
Zhang, Can [1 ]
Fouquet, Martin [1 ]
Hofmann, Stephan [1 ]
机构：
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2012年 / 51卷 / 01期
关键词：
LOW-TEMPERATURE SYNTHESIS; ELECTRICAL-PROPERTIES; ARRAY GROWTH; INTERCONNECT; FUTURE; TECHNOLOGIES; SPECTROSCOPY; NUCLEATION; MECHANISM; THICKNESS;
D O I：
10.1143/JJAP.51.01AH01
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The requirements for using carbon nanotubes as vias and interconnects are described. The growth of high density forests of vertically-aligned carbon nanotubes for interconnect applications by chemical vapor deposition is described. Densities up to 1.4 x 10(13) cm(-2) have been achieved by maintaining a small nanotube diameter. The process integration devices is reviewed. (C) 2012 The Japan Society of Applied Physics
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页数：8
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