共 50 条
- [1] Modeling and fabrication of thin film thermopile sensor JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (03): : 1466 - 1472
- [2] Thermal simulation of a micromachined thermopile-based thin-film gas flow sensor Microelectron J, 4-5 (291-297):
- [7] Thin film heater and thermopile built up using some silicides under thermal test 2006 29TH INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY, 2006, : 46 - +
- [8] Noncontact temperature sensing with thin film thermopile detectors Sensors (Peterborough, NH), 1989, 6 (01): : 28 - 32