A primary standard for 157 nm excimer laser measurements

Two primary standard calorimeters have been developed for accurate measurements of 157 nm (F-2) excimer laser power and energy. The calorimeter specifications and design are discussed. Results from the construction and testing of the calorimeters, control electronics, data acquisition, and N-2 purge system are presented. These calorimeters have demonstrated a two-fold improvement in sensitivity over existing NIST excimer laser calorimeters. The measurement uncertainty from electrical calibrations is a five-fold improvement over the NIST 193 nm primary standard.