Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions (vol 10, 799, 2019)

被引：0
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作者：
De Teresa, Jose Maria [1 ,2 ,3 ]
Orus, Pablo [1 ,2 ]
Cordoba, Rosa [4 ]
Philipp, Patrick [5 ]
机构：
[1] Univ Zaragoza, CSIC, ICMA, Calle Pedro Cerbuna 12, E-50009 Zaragoza, Spain
[2] Univ Zaragoza, Fac Ciencias, Dept Fis Mat Condensada, Calle Pedro Cerbuna 12, E-50009 Zaragoza, Spain
[3] INA, LMA, Edificio I D,Campus Rio Ebro, Zaragoza 50018, Spain
[4] Univ Valencia, Inst Ciencia Mol, Catedratico Jose Beltran 2, Paterna 46980, Spain
[5] LIST, AINA, MRT Dept, 41 Rue Brill, L-4422 Belvaux, Luxembourg
来源：
MICROMACHINES | 2020年 / 11卷 / 02期
关键词：
D O I：
10.3390/mi11020211
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
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页数：1
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