Langmuir Probe Technique for Plasma Characterization during Pulsed Laser Deposition Process

被引:33
|
作者
Irimiciuc, Stefan Andrei [1 ]
Chertopalov, Sergii [2 ]
Lancok, Jan [2 ]
Craciun, Valentin [1 ,3 ]
机构
[1] Natl Inst Laser Plasma & Radiat Phys NILPRP, 409 Atomistilor St, Bucharest 077125, Romania
[2] Czech Acad Sci, Inst Phys, Na Slovance 2 1999-2, Prague 18200, Czech Republic
[3] IFIN HH, Extreme Light Infrastruct Nucl Phys, Magurele 077125, Romania
关键词
Langmuir probe; laser ablation; pulsed laser deposition; laser induced plasma; DIAMOND-LIKE CARBON; CHARGE SEPARATION; ABLATION PLUMES; LOW-TEMPERATURE; DYNAMICS; VACUUM; GROWTH; VAPORIZATION; EVAPORATION; GENERATION;
D O I
10.3390/coatings11070762
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The history of pulsed laser deposition (PLD) and transient plasmas generated by laser ablation is intertwined with the development of various techniques for its fundamental understanding. Some diagnostic tools have been developed to better suit the rapid transient nature of the plasma (space and time dependence of all parameters, fast decay and complex chemistry inside the plasma), whereas others have been adapted from basic plasma physics studies. Langmuir probe method has been used as a real-time in situ diagnostic tool for laser ablation and later for PLD. It remains a useful tool for the PLD community arsenal, which can easily be adapted to the development of new lasers and ablation regimes and new deposition configuration, being one of the most versatile techniques for plasma diagnostics. It is the cornerstone on which charge particles are analyzed and has led to several important discoveries, such as multiple peak distribution, selective acceleration during expansion, plume splitting, plasma turbulences and fluctuations. However, because the Langmuir probe theory adaptation from classical plasma physics is not straightforward, it might lead to misinterpretation and often incorrect analysis of data. This review analyzes the limits and understanding of the technique as a foundation for attaining its full potential, which can impact the way PLD is used. This is especially useful for the pressing need of real-time, in-situ diagnostics and feedback loops for systematic semi-industrial implementation of the PLD technique.
引用
收藏
页数:17
相关论文
共 50 条
  • [21] Langmuir probe measurement of the bismuth plasma plume formed by an extreme-ultraviolet pulsed laser
    Pira, P.
    Burian, T.
    Kolpakova, A.
    Tichy, M.
    Kudrna, P.
    Danis, S.
    Juha, L.
    Lancok, J.
    Vysin, L.
    Civis, S.
    Zelinger, Z.
    Kubat, P.
    Wild, J.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2014, 47 (40)
  • [22] Magnetron sputter pulsed laser deposition: technique and process control developments
    Jones, JG
    Voevodin, AA
    SURFACE & COATINGS TECHNOLOGY, 2004, 184 (01): : 1 - 5
  • [23] A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring
    Samara, V.
    Booth, J-P
    de Marneffe, J-F
    Milenin, A. P.
    Brouri, M.
    Boullart, W.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2012, 21 (06):
  • [24] A plasma diagnostic technique using a floating probe for the dielectric deposition process
    Bang, Jin-Young
    Yoo, Kyoung
    Kim, Dong-Hwan
    Chung, Chin-Wook
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (06):
  • [25] An automated Langmuir probe controller for plasma characterization
    Bustos, A.
    Juarez, A. M.
    de Urquijo, J.
    Munoz, M.
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2016, 27 (08)
  • [26] Langmuir probe characterization of laser ablation plasmas
    Doggett, Brendan
    Lunney, James G.
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (03)
  • [27] Synthesis and characterization of boron antimonide films by pulsed laser deposition technique
    Das, S.
    Bhunia, R.
    Hussain, S.
    Bhar, R.
    Chakraborty, B. R.
    Pal, A. K.
    APPLIED SURFACE SCIENCE, 2015, 353 : 439 - 448
  • [28] LASER-INDUCED PLASMA FORMATION DURING PULSED-LASER DEPOSITION
    ADEN, M
    KREUTZ, EW
    VOSS, A
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (10) : 1545 - 1553
  • [30] Triple Langmuir probe measurements in the plume of a pulsed plasma thruster
    Eckman, R
    Byrne, L
    Gatsonis, NA
    Pencil, EJ
    JOURNAL OF PROPULSION AND POWER, 2001, 17 (04) : 762 - 771