Design of MEMS filter for Wimax systems

Novel MEMS (micro-electric- mechanical-system) SAW (Surface Acoustic Wave) is designed in this paper, and it is manufactured by CMOS, it is easy to integrate other components for SOC (System on Chip). The filter is realized by CPW (Coplanar Waveguide) cavity and BAR (Bulk Acoustic Resonator), and then the equal circuit model is analyzed, the parameters of circuit model is extracted by ADS (Advanced design systems) software. The performance of filter is analyzed by HFSS software, and it center frequency is 2.2GHz, 3dB band is 200MHz. The test model is analyzed by equal CMOS circuit, and the performance of models achieved by network Analyzer: center frequency of 2.28GHz, 3dB band of 100MHz, band stop more than 20dB, and scale of 3.5x2.0mm2. The filter is satisfied with the requirement of Wimax communications systems, and it has micro scale, easily integrating. If these design physical parameters are changed, the different performances of filters are obtained, and the design has theory, and application value.