Sprayed and thermally evaporated SnO2 thin films for ethanol sensors

被引：58
|
作者：
Brousse, T
Schleich, DM
机构：
[1] Lab. de Génie des Mat., ISITEM, F44087 Nantes Cedex 03, rue Christian Pauc
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 31卷 / 1-2期
关键词：
tin dioxide thin film; ethanol sensor; spray pyrolysis; thermal evaporation;
D O I：
10.1016/0925-4005(96)80019-0
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Tin dioxide thin films have been prepared by both spray pyrolysis and thermal evaporation on alumina substrates. The main purpose was to determine suitable microstructural and electrical properties for ethanol sensors. Chlorine content in precursor solutions used in the spray pyrolysis technique affects both the structural and the electrical properties of the films. Chlorine-free precursors were prepared to achieve porous SnO2 films. Ethanol sensing properties were determined and compared to thermally evaporated films.
引用
收藏
页码：77 / 79
页数：3
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