Room-temperature selective epitaxial growth of CoO (111) and Co3O4 (111) thin films with atomic steps by pulsed laser deposition

被引:34
|
作者
Matsuda, Akifumi [1 ]
Yamauchi, Ryosuke [1 ]
Shiojiri, Daishi [1 ]
Tan, Geng [1 ]
Kaneko, Satoru [1 ,2 ]
Yoshimoto, Mamoru [1 ]
机构
[1] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Dept Innovat & Engn Mat, Midori Ku, Yokohama, Kanagawa 2268502, Japan
[2] Kanagawa Ind Technol Ctr, Ebina, Kanagawa 2430435, Japan
关键词
Cobalt oxide; Epitaxy; Thin film; Pulsed laser deposition; Room temperature; Atomic steps; SCANNING-TUNNELING-MICROSCOPY; COBALT OXIDE; FABRICATION; SAPPHIRE; MGO(001); COO(001); SI(111); NIO;
D O I
10.1016/j.apsusc.2015.04.205
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Cobalt oxide epitaxial thin films of both rock-salt CoO and spinel Co3O4 were selectively synthesized on atomically stepped alpha-Al2O3 (0 0 0 1) substrates at room temperature under well-controlled oxygen pressures by pulsed laser deposition. X-ray diffraction and reflection high-energy electron diffraction analyses demonstrated that the CoO and Co3O4 films were grown with phase control and good epitaxial quality at room temperature (20 degrees C). The Co0 (1 1 1) film was obtained in ultra-high vacuum of 1 x 10(-8) Torr, while the Co3O4 (1 1 1) film was grown in 1 x 10(-2) Torr of O-2. X-ray reciprocal space mapping results indicated that the in-plane mismatches of the {1 = 10} planes of CoO (1 1 1) and Co3O4 (1 1 1) films with the substrate were 4.5% and 2.5%, respectively. The films were almost entirely relaxed with ratios of expansion less than +2%; the films underwent slight elongation along the [1 1 1] axis and shrinkage in the (1 1 1) plane. The surfaces of the as-grown CoO and Co3O4 thin films revealed atomic steps reflective of those on the substrates. Their root-mean-square roughness values were about 0.1 nm indicating suppressed grain growth on the substrates at room temperature. The optical bandgap of the epitaxial CoO (1 1 1) film was estimated to be 2.72 eV accompanied with a broad absorption attributable to non-stoichiometry or d-d transition. The bandgap of the Co3O4 (1 1 1) film was evaluated as 1.42 eV, and also absorption at 1.86 eV was observed. The obtained room-temperature epitaxial growth of CoO and Co3O4 thin films contributes to enhance their catalytic ability and quality of layer-stacking devices in terms of improving surface/interface flatness and specific surface area. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:78 / 82
页数:5
相关论文
共 50 条
  • [21] Room Temperature Growth of Epitaxial Titanium Nitride Films by Pulsed Laser Deposition
    Rasic, Daniel
    Sachan, Ritesh
    Chisholm, Matthew F.
    Prater, John
    Narayan, Jagdish
    CRYSTAL GROWTH & DESIGN, 2017, 17 (12) : 6634 - 6640
  • [22] GROWTH OF EPITAXIAL BETA-FESI2 THIN-FILMS BY PULSED-LASER DEPOSITION ON SILICON(111)
    OLK, CH
    KARPENKO, OP
    YALISOVE, SM
    DOLL, GL
    MANSFIELD, JF
    JOURNAL OF MATERIALS RESEARCH, 1994, 9 (11) : 2733 - 2736
  • [23] GROWTH OF EPITAXIAL PRO2 THIN-FILMS ON HYDROGEN TERMINATED SI (111) BY PULSED LASER DEPOSITION
    FORK, DK
    FENNER, DB
    GEBALLE, TH
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) : 4316 - 4318
  • [24] Growth and characteristics of zinc oxide thin films on silicon(111) by pulsed laser deposition
    Institute of Semiconductor, Shandong Normal University, Ji'nan 250014, China
    Gongneng Cailiao, 2006, 6 (978-980+985):
  • [25] Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
    Donders, M. E.
    Knoops, H. C. M.
    van de Sanden, M. C. M.
    Kessels, W. M. M.
    Notten, P. H. L.
    ATOMIC LAYER DEPOSITION APPLICATIONS 5, 2009, 25 (04): : 39 - 47
  • [26] Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
    Donders, M. E.
    Knoops, H. C. M.
    van de Sanden, M. C. M.
    Kessels, W. M. M.
    Notten, P. H. L.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2011, 158 (04) : G92 - G96
  • [27] Epitaxial growth of Co3O4 films by low temperature, low pressure chemical vapour deposition
    Shalini, K
    Mane, AU
    Shivashankar, SA
    Rajeswari, M
    Choopun, S
    JOURNAL OF CRYSTAL GROWTH, 2001, 231 (1-2) : 242 - 247
  • [28] Epitaxial growth of Co3O4 films by low temperature, low pressure chemical vapor deposition
    Shalini, K
    Mane, AU
    Lakshmi, R
    Shivaskankar, SA
    Rajeswari, M
    Choopun, S
    RECENT DEVELOPMENTS IN OXIDE AND METAL EPITAXY-THEORY AND EXPERIMENT, 2000, 619 : 129 - 134
  • [29] Epitaxial growth of Co3O4 thin films using Co(dpm)3 by MOCVD
    Alema, Fikadu
    Osinsky, Andrei
    Mukhopadhyay, Partha
    Schoenfeld, Winston, V
    JOURNAL OF CRYSTAL GROWTH, 2019, 525
  • [30] Homoepitaxial growth of α-Al2O3 thin films on atomically stepped sapphire substrates by pulsed laser deposition at room-temperature
    Shiojiri, Daishi
    Yamauchi, Ryosuke
    Kaneko, Satoru
    Matsuda, Akifumi
    Yoshimoto, Mamoru
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2013, 121 (1413) : 467 - 469