Research on Precise Pneumatic-Electric Displacement Sensor with Large Measurement Range

This research mainly focuses on precise pneumatic-electric displacement sensor which has large measurement range. Under the high precision, measurement range can be expanded so that the need of high precision as well as large range can be satisfied in the field of machining inspection technology. This research was started by the analysis of pneumatic-measuring theory. Then, an gas circuit measuring system which is based on differential pressure was designed. This designed system can reach two aims: Firstly, to convert displacement signal into gas signal; Secondly, to reduce the measurement error which caused by pressure and environmental turbulence. Furthermore, in consideration of the high requirement for linearity, sensitivity and stability, the project studied the pneumatic-electric transducer which puts the SCX series pressure sensor as a key part. The main purpose of this pneumatic-electric transducer is to convert gas signal to suitable electrical signal. Lastly, a broken line subsection linearization circuit was designed, which can nonlinear correct the output characteristic curve so as to enlarge the linear measurement range. The final result could be briefly described like this: under the condition that measuring error is less than 1 mu m, measurement range could be extended to approximately 200 mu m which is much higher than the measurement range of traditional pneumatic measuring instrument. Meanwhile, it can reach higher exchangeability and stability in order to become more suitable to engineering application.