NANO-OPTO-ELECTRO-MECHANICAL (NOEM) OSCILLATOR WITH CONTROLLABLE NON-LINEAR DYNAMICS

被引：0

作者：

Dong, B. ^{[1
,2
]}

Huang, J. G. ^{[3
]}

Cai, H. ^{[2
]}

Kropelnicki, P. ^{[2
]}

Randles, A. B. ^{[2
]}

Gu, Y. D. ^{[2
]}

Liu, A. Q. ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

[2] ASTAR, Inst Microelect, Singapore 117685, Singapore

[3] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China

来源：

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2014年

关键词：

CAVITY OPTOMECHANICS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a nano-opto-electro-mechanical (NOEM) oscillator with controllable non-linear dynamics is demonstrated. An optical gradient force driven cantilever shows high non-linearity due to non-linear behavior of the optical force. The non-linear dynamics of the oscillator which utilizes opto-mechanical interaction is well studied and controlled by varying the optical signal, including the power and wavelength. The resonance frequency of the oscillator can be tuned by up to 50 KHz by changing the detuning condition of the opto-mechanical system. It has potential applications such as optical navigation sensors, actuators and optical switches.

引用

页码：1261 / 1264

页数：4

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