H2S sensing in the ppb regime with zinc oxide nanowires

被引:37
|
作者
Huber, Florian [1 ]
Riegert, Soeren [1 ]
Madel, Manfred [1 ,2 ]
Thonke, Klaus [1 ]
机构
[1] Univ Ulm, Semicond Phys Grp, Inst Quantum Matter, Albert Einstein Allee 45, D-89081 Ulm, Germany
[2] United Monolith Semicond GmbH, D-89081 Ulm, Germany
关键词
Zinc oxide; Nanowires; Chemical vapour deposition; Gas sensing; Hydrogen sulfide; HYDROGEN-SULFIDE; ZNO NANORODS; TEMPERATURE; SENSOR; FILMS; GROWTH;
D O I
10.1016/j.snb.2016.08.023
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this work, we investigate the hydrogen sulfide (H2S)-gas-sensing-properties of zinc oxide (ZnO) nanowires. By a common chemical vapour deposition (CVD) process ZnO nanowires were grown on silicon (111) using a mixture of ZnO and graphite powder as source material. Subsequently, the nanowires were separated from the substrate and placed on a metal contact structure using dielectrophoresis. The sensing properties of the nanowires were tested in a temperature stabilized setup. Applying a constant voltage and exposing to H2S leads to an increase of the current through the nanowires. Especially the role of oxygen in the sensing mechanism has been investigated using different gases for flushing. We demonstrate that oxygen is crucial for the reset of the sensor and multiple sensing cycles with one sensor were realized. The ZnO nanowires show a very high sensitivity and a H2S concentration of only 50 ppb can be detected. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:358 / 363
页数:6
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