Photochemical self-developing of doped sol-gel hybrid glass waveguides

被引：5

作者：

Bae, BS ^{[1
]}

Jung, JI ^{[1
]}

Park, OH ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, LOMC, Taejon 305701, South Korea

来源：

ORGANIC PHOTONIC MATERIALS AND DEVICES III | 2001年 / 4279卷

关键词：

sol-gel hybrid glass; photolocking; photoinitiator; photochemical self-developing; channel waveguide;

D O I：

10.1117/12.429373

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sol-gel hybrid glass (SGHG) films doped with various photoinitiators; were prepared. Volatile photoinitiators are photolocked in SGHG matrix by photochemical reaction upon UV exposure. Refractive index and film thickness increases by UV exposure due to photoinduced polymerization and photolocking of high refractive index species. Using the photolocking of photoinitiators, channel waveguide was fabricated without using developing process step, which will be called photochemical self-developing.

引用

页码：101 / 108

页数：8

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