Unconventional processing for defects control in block-copolymer thin films

被引：0
|
作者：
Karim, Alamgir [1 ]
Kim, Sangcheol [1 ]
Berry, Brian [1 ]
Briber, Robert M. [2 ]
Kim, Ho-Cheol [3 ]
机构：
[1] Natl Inst Stand & Technol, Div Polymers, Gaithersburg, MD 20899 USA
[2] Univ Maryland, Dept Mat Sci & Engn, College Pk, MD 20742 USA
[3] IBM Corp, Almaden Res Ctr, Div Res, San Jose, CA 95120 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2007年 / 233卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
251-POLY
引用
收藏
页数：1
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