Determination of the thickness and optical constants of thin films from transmission spectra

被引：40
|
作者：
Kubinyi, M [1 ]
Benko, N [1 ]
Grofcsik, A [1 ]
Jones, WJ [1 ]
机构：
[1] UNIV COLL SWANSEA, DEPT CHEM, SWANSEA SA2 8PP, W GLAM, WALES
来源：
THIN SOLID FILMS | 1996年 / 286卷 / 1-2期
基金：
匈牙利科学研究基金会; 英国工程与自然科学研究理事会;
关键词：
amorphous materials; optical properties; optical spectroscopy; silicon;
D O I：
10.1016/S0040-6090(96)08737-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A method has been developed to determine the thickness and the wavelength-dependent refractive indices and absorption coefficients of thin optical films by fitting a five parameter function to measured transmission spectra. Initial values for the fitting parameter are obtained from the transmission values at the spectral maxima and minima of the interference patterns created by the films. This is followed by a systematic variation of those parameters which can cause a failure of the calculation by reaching local minima of The residual sum of squares. The final fitting is performed with a Marquardt algorithm. A Monte Carlo simulation has indicated that the accuracy of this method is at least one order of magnitude better than that of the methods utilising only the interference extrema.
引用
收藏
页码：164 / 169
页数：6
相关论文
共 50 条
  • [31] Determination of optical parameters and thickness of weakly absorbing thin films from reflectance and transmittance spectra
    Kutavichus, Vitaly P.
    Filippov, Valery V.
    Huzouski, Vitali H.
    APPLIED OPTICS, 2006, 45 (19) : 4547 - 4553
  • [32] Determination of optical constants of thin dielectric films using the spectral transmission coefficient
    Shapovalov, V. I.
    Morozova, A. A.
    Lapshin, A. E.
    GLASS PHYSICS AND CHEMISTRY, 2014, 40 (03) : 341 - 345
  • [33] Determination of optical constants of thin dielectric films using the spectral transmission coefficient
    V. I. Shapovalov
    A. A. Morozova
    A. E. Lapshin
    Glass Physics and Chemistry, 2014, 40 : 341 - 345
  • [34] Method for finding the optical constants of films from their reflection and transmission spectra
    Kotlikov, E. N.
    JOURNAL OF OPTICAL TECHNOLOGY, 2021, 88 (07) : 391 - 396
  • [35] Determination of optical constants of thin films from transmittance trace
    Bhattacharyya, S. R.
    Gayen, R. N.
    Paul, R.
    Pal, A. K.
    THIN SOLID FILMS, 2009, 517 (18) : 5530 - 5536
  • [36] Determination of thickness and optical constants of solgel derived polyvinylpyrrolidone/ZrO2 films from transmission spectra using different dispersion models
    Jia, Hongbao
    Sun, Jinghua
    Xu, Yao
    Wu, Dong
    APPLIED OPTICS, 2012, 51 (29) : 6937 - 6944
  • [37] Calculation of Optical Constants of Thin Films Regarding Their Infrared Transmission and Reflection Spectra.
    Hild, E.
    Tungsram Technische Mitteilungen, 1977, (32): : 1359 - 1372
  • [38] Determination of the thickness and optical constants of amorphous Ge-Se-Bi thin films
    Dahshan, A.
    Aly, K. A.
    PHILOSOPHICAL MAGAZINE, 2009, 89 (12) : 1005 - 1016
  • [39] DETERMINATION OF THE OPTICAL-CONSTANTS AND THICKNESS OF THIN-FILMS ON SLIGHTLY ABSORBING SUBSTRATES
    RUSLI
    AMARATUNGA, GAJ
    APPLIED OPTICS, 1995, 34 (34): : 7914 - 7924
  • [40] Determination of optical constants of thin films in the EUV
    Ciesielski, Richard
    Saadeh, Qais
    Philipsen, Vicky
    Opsomer, Karl
    Soulie, Jean-Philippe
    Wu, Meiyi
    Naujok, Philipp
    van de Kruijs, Robbert W. E.
    Detavernier, Christophe
    Kolbe, Michael
    Scholze, Frank
    Soltwisch, Victor
    APPLIED OPTICS, 2022, 61 (08) : 2060 - 2078
12345