Electromechanical coupling factor of epitaxial gallium nitride doped with magnesium

被引:0
|
作者
Woods, R. C.
Xu, X.
机构
[1] Louisiana State Univ, Dept Elect & Comp Engn, Baton Rouge, LA 70803 USA
[2] Iowa State Univ, Dept Elect & Comp Engn, Ames, IA 50010 USA
关键词
D O I
10.1007/s10854-007-9209-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In a recent paper, Lee et al. (IEEE Trans. Electron Devices 48, 524 (2001)) reported that the piezoelectric constant k(2) of an Mg-doped GaN epilayer was (4.3 +/- 0.3)%, which is much higher than for other III-V materials. In this work, k(2) for a Mg-doped GaN epilayer was independently determined using SAW delay-lines fabricated using aluminum interdigital transducers. The insertion loss of these filters was higher than 80 dB. The upper bound of the electromechanical coupling coefficient (k(2)) of the Mg-doped GaN epilayer was calculated to be 1 x 10(-4)% which is not in agreement with the previously reported value (Lee et al., IEEE Trans. Electron Devices 48, 524 (2001)).
引用
收藏
页码:S267 / S270
页数:4
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