Real-time observation of electron-stimulated effects on Si(001)-(2 x 1) by optical reflectance spectroscopic methods

被引：1
|
作者：
Ohno, S.
Takizawa, J.
Koizumi, J.
Mitobe, F.
Tamegai, R.
Suzuki, T.
Shudo, K.
Tanaka, M.
机构：
[1] Yokohama Natl Univ, Fac Engn, Dept Phys, Hodogaya Ku, Yokohama, Kanagawa 2408501, Japan
[2] Natl Def Acad, Sch Appl Sci, Dept Appl Phys, Yokosuka, Kanagawa 2398686, Japan
来源：
JOURNAL OF PHYSICS-CONDENSED MATTER | 2007年 / 19卷 / 44期
关键词：
D O I：
10.1088/0953-8984/19/44/446008
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
We have studied the process of electron-stimulated defect formation on a Si(001)-( 2 x 1) surface by means of a combination of two different surface optical methods, surface differential reflectance spectroscopy and reflectance anisotropy spectroscopy. Time courses obtained with both methods followed an exponential curve during electron irradiation over the range of 100 - 1000 eV. The spectral features and related physical phenomena are discussed.
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页数：7
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