LASER INTERFERENCE LITHOGRAPHY FOR TWO DIMENSIONAL VARIABLE SHAPE MICROSCOPIC STRUCTURES

被引：0
|
作者：
Armakavicius, Nerijus [1 ]
Jurkeviciute, Ausrine [1 ]
Tamulevicius, Tomas
Puodziukynas, Linas [1 ]
Andrulevicius, Mindaugas
Tamulevicius, Sigitas
机构：
[1] Kaunas Univ Technol, Dept Phys, LT-51368 Kaunas, Lithuania
来源：
RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2012 | 2012年
关键词：
interference lithography; 1D; 2D periodical structures; PERIODIC STRUCTURES;
D O I：
暂无
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
In this work we present a low cost and high throughput interference lithography method for fabrication of one-dimensional and two-dimensional periodical structures with submicrometer features. Interference patterns of He-Cd laser beams were recorded in ma-P 1205 photoresist layer by two-beam interference technique with double exposure. Varying the angle between two exposures from 15 degrees to 90 degrees provided different periodical structures, i.e. sticks, squares. Fabricated structures were investigated employing optical and scanning electron microscopes.
引用
收藏
页码：387 / 390
页数：4
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