Growth of graphene structure on 6H-SiC(0001):: Molecular dynamics simulation

被引:29
|
作者
Tang, Chao [1 ]
Meng, Lijun [1 ]
Xiao, Huaping [1 ]
Zhong, Jianxin [1 ]
机构
[1] Xiangtan Univ, Dept Phys, Xiangtan 411105, Hunan, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1063/1.2894728
中图分类号
O59 [应用物理学];
学科分类号
摘要
The growth process of graphene structure on 6H-SiC(0001) surface has been studied using the classical molecular dynamics simulation and the simulated annealing technique. Effects of annealing temperature and coverage of carbon atoms on the formation of graphene have been investigated. We found that two layers of carbon atoms of the 6H-SiC(0001) subsurface after sublimation of Si atoms undergo a transformation from a diamondlike phase to a graphenelike structure at annealing temperature above 1500 K. This transformation temperature is in good agreement with experimental observations. We also found that the formation of graphene structure strongly depends on the number of carbon layers. Two layers of carbon atoms result in large graphene clusters and four layers of carbon lead to the formation of graphene bilayer sheets. However, a single layer of carbon only forms chainlike and ringlike clusters without the hexagonal ordering. Our results provide atomic-level information about the graphitization of the 6H-SiC(0001) surface, which is useful in controlling the growth of graphene sheets. (C) 2008 American Institute of Physics.
引用
收藏
页数:5
相关论文
共 50 条
  • [21] Study of the crystal and electronic structure of graphene films grown on 6H-SiC (0001)
    Davydov, V. Yu.
    Usachov, D. Yu.
    Lebedev, S. P.
    Smirnov, A. N.
    Levitskii, V. S.
    Eliseyev, I. A.
    Alekseev, P. A.
    Dunaevskiy, M. S.
    Vilkov, O. Yu.
    Rybkin, A. G.
    Lebedev, A. A.
    SEMICONDUCTORS, 2017, 51 (08) : 1072 - 1080
  • [22] Epitaxial graphene on 6H-SiC(0001): Defects in SiC investigated by STEM
    Gruschwitz, Markus
    Schletter, Herbert
    Schulze, Steffen
    Alexandrou, Ioannis
    Tegenkamp, Christoph
    PHYSICAL REVIEW MATERIALS, 2019, 3 (09)
  • [23] Approaching Truly Freestanding Graphene: The Structure of Hydrogen-Intercalated Graphene on 6H-SiC(0001)
    Sforzini, J.
    Nemec, L.
    Denig, T.
    Stadtmueller, B.
    Lee, T. -L.
    Kumpf, C.
    Soubatch, S.
    Starke, U.
    Rinke, P.
    Blum, V.
    Bocquet, F. C.
    Tautz, F. S.
    PHYSICAL REVIEW LETTERS, 2015, 114 (10)
  • [24] Oxidation of 6H-SiC(0001)
    Simon, L
    Kubler, L
    Ermolieff, A
    Billon, T
    MICROELECTRONIC ENGINEERING, 1999, 48 (1-4) : 261 - 264
  • [25] Oxidation of 6H-SiC(0001)
    Simon, L.
    Kubler, L.
    Ermolieff, A.
    Billon, T.
    Microelectronic Engineering, 1999, 48 (01): : 261 - 264
  • [26] MOCVB growth of GaBN on 6H-SiC (0001) substrates
    Wei, CH
    Xie, ZY
    Edgar, JH
    Zeng, KC
    Lin, JY
    Jiang, HX
    Chaudhuri, J
    Ignatiev, C
    Braski, DN
    JOURNAL OF ELECTRONIC MATERIALS, 2000, 29 (04) : 452 - 456
  • [27] MOCVD growth of GaBN on 6H-SiC (0001) substrates
    C. H. Wei
    Z. Y. Xie
    J. H. Edgar
    K. C. Zeng
    J. Y. Lin
    H. X. Jiang
    J. Chaudhuri
    C. Ignatiev
    D. N. Braski
    Journal of Electronic Materials, 2000, 29 : 452 - 456
  • [28] Effects of Al on epitaxial graphene grown on 6H-SiC (0001)
    Xia, C.
    Johansson, L. I.
    Zakharov, A. A.
    Hultman, L.
    Virojanadara, C.
    MATERIALS RESEARCH EXPRESS, 2014, 1 (01):
  • [29] Transitional structures of the interface between graphene and 6H-SiC (0001)
    Norimatsu, Wataru
    Kusunoki, Michiko
    CHEMICAL PHYSICS LETTERS, 2009, 468 (1-3) : 52 - 56
  • [30] Si doping superlattice structure on 6H-SiC(0001)
    Li, Lianbi
    Zang, Yuan
    Hu, Jichao
    INTERNATIONAL CONFERENCE ON COMPOSITE MATERIAL, POLYMER SCIENCE AND ENGINEERING (CMPSE2017), 2017, 130