Effect of surface intermixing on the morphology of Sb-terminated Ge(100) surfaces

被引:17
|
作者
Chan, LH [1 ]
Altman, EI [1 ]
机构
[1] Yale Univ, Dept Chem Engn, New Haven, CT 06520 USA
来源
PHYSICAL REVIEW B | 2001年 / 63卷 / 19期
关键词
D O I
10.1103/PhysRevB.63.195309
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The interaction of Sb with Ge(100) was investigated as a function of substrate temperature and Sb coverage using temperature programmed desorption, low energy electron diffraction, ion scattering, and scanning tunneling microscopy. An Sb desorption peak associated with multilayer physical adsorption was observed at 550 K while a second desorption peak at 980 K was attributed to Sb bound to the Ge surface. Four basic types of Sb clusters were identified at 320 K: a three-dimensional tetramer; a square, flat tetramer; dimers running perpendicular to the substrate dimer rows; and dimers running parallel to the dimer rows. The three-dimensional tetramer was observed to convert irreversibly to the flat tetramer, while the flat tetramer reversibly split to form the dimers. Diffusion of both the flat tetramers and the perpendicular dimers led to the formation of asymmetric (2 x 1) reconstructed islands. At 520 K, Sb started to displace Ge in the top layer creating pits at low Sb coverage. As the Sb coverage was increased, both islands and pits were observed. Intermixing between Sb and Ce was found in both the islands and the original surface layer. Intermixing, however, was limited between 520 K and 620 K when the Ge surface was covered with 1 monolayer or more of Sb, resulting in the smoothest Sb-terminated Ge surfaces. Regardless of how the Sb layer was prepared, annealing at 800 K roughened the surface severely and increased the amount of exposed Ge, even though no Sb desorbed at this temperature. The surface roughening was attributed to the increased surface area enabling Sb-Ge exchange without burying the lower surface tension Sb beneath the surface. Antimony is used as a surfactant to promote the growth of flat Ge films. The results demonstrate, however, that intermixing can lead to the surfactant severely roughening the surface if the growth of the surfactant layer is not carefully controlled.
引用
收藏
页数:13
相关论文
共 50 条
  • [41] Changes in the surface morphology of Ge(001) due to Sb adsorption
    Falkenberg, G
    Seehofer, L
    Johnson, RL
    SURFACE SCIENCE, 1997, 377 (1-3) : 75 - 80
  • [42] Changes in the surface morphology of Ge(001) due to Sb adsorption
    Universitaet Hamburg, Hamburg, Germany
    Surf Sci, 1-3 (75-80):
  • [43] Symmetric Sb dimers and the possibility of mixed Si-Ge layers in the Sb/Ge/Si(100) surface
    Takeuchi, N
    PHYSICAL REVIEW B, 1997, 56 (12): : 7446 - 7448
  • [45] Analysis of defect-free GaSb/GaAs(001) quantum dots grown on the Sb-terminated (2 x 8) surface
    Martin, Andrew J.
    Saucer, Timothy W.
    Sun, Kai
    Kim, Sung Joo
    Ran, Guang
    Rodriguez, Garrett V.
    Pan, Xiaoqing
    Sih, Vanessa
    Millunchick, Joanna
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2012, 30 (02):
  • [46] X-ray photoelectron-diffraction study of intermixing and morphology at the Ge/Si(001) and Ge/Sb/Si(001) interface
    Gunnella, R
    Castrucci, P
    Pinto, N
    Davoli, I
    Sebilleau, D
    DeCrescenzi, M
    PHYSICAL REVIEW B, 1996, 54 (12) : 8882 - 8891
  • [47] X-RAY STANDING-WAVE STUDY OF AN SB-TERMINATED GAAS(001)-(2X4) SURFACE
    SUGIYAMA, M
    MAEYAMA, S
    MAEDA, F
    OSHIMA, M
    PHYSICAL REVIEW B, 1995, 52 (04): : 2678 - 2681
  • [48] Surface reflectance anisotropy of indium-terminated GaAs(100) surfaces
    Springer, C
    ReschEsser, U
    Goletti, C
    Richter, W
    Fimland, BO
    SURFACE SCIENCE, 1997, 377 (1-3) : 404 - 408
  • [49] Effect of modification of S-terminated Ge(100) surface on ALD HfO2 gate stack
    Lee, Younghwan
    Park, Kibyung
    Im, Kyung Taek
    Lee, June Young
    Im, Seongil
    Lee, Jung Han
    Yi, Yeonjin
    Lim, Sangwoo
    APPLIED SURFACE SCIENCE, 2009, 255 (16) : 7179 - 7182
  • [50] Reactions of disilane with the deuterium-terminated Ge(100) 2 x 1 surface
    Underwood, Grant
    Ballast, Lynette Keller
    Campion, Alan
    SURFACE SCIENCE, 2008, 602 (12) : 2009 - 2016