NiZn ferrite thin films were performed on glass substrates of 85 degrees C by spin spray plating method. X-ray diffraction patterns of the films show that the samples have a cubic spinel structure between 75 degrees C and 85 degrees C. As the pH value of oxidizing solution increases to 8.3, the saturation magnetization increases to 313 emu/cm(3) and resistivity to 1. 27 Omega center dot cm. Film deposited at pH 7.8 has a smooth surface and definite columnar structure. The large wavy flakes were observed at pH 8. 3. The high real part of complex permeability mu ' up to 36. 1 and the imaginary part mu '' up to 53. 2 were observed at 0.5GHz by shorted microstrip line perturbation method. The mu '' of thin film has values higher than 20 at the frequencies between 0. 5GHz and 2GHz, the film is a promising shielding material for high frequency applications.