Current state and prospect of micro-machining

被引：0
|
作者：
Li, Xiaoxia [1 ]
Wang, Jiuhe [1 ]
Li, Wen [2 ]
机构：
[1] Yanshan Univ, Sch Management, Qinhuangdao, Hebei Province, Peoples R China
[2] China Univ Mining & Technol, Sch Mech Engn & Automat, Xuzhou, Jiangsu, Peoples R China
来源：
2007 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION AND LOGISTICS, VOLS 1-6 | 2007年
关键词：
micro-machining; machining processes; industrial application;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Micro-machining is a delicate process that requires pinpoint accuracy. Researchers in academia and industry worldwide are striving to develop efficient fabrication techniques for features in ranges of a few micrometers and even nanometers. The current leading micro-machining processes are micro drilling, micro mining, and micro turning, micro EDM, micro USM, micro LBM, micro ECM and LIGA. In this paper, the latest advances of diverse micromachining technologies win be discussed. Challenges still exist in fields like innovation in workpiece and tool material, development of auxiliary tooling equipment together with processes combination, etc.
引用
收藏
页码：1414 / +
页数：3
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