Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

被引：2

作者：

Wei, Ching-Liang ^{[1
]}

Chen, Ying-Chung ^{[1
]}

Kao, Kuo-Sheng ^{[2
]}

Wu, Kuang-Tsung ^{[2
]}

Cheng, Da-Long ^{[2
]}

Hsieh, Po-Tung ^{[3
]}

机构：

[1] Natl Sun Yat Sen Univ, Dept Elect Engn, Kaohsiung 804, Taiwan

[2] Shu Te Univ, Dept Comp & Commun, Yanchao 824, Kaohsiung Cty, Taiwan

[3] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan

来源：

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2010年 / 9卷 / 03期

关键词：

ZnO; LiNbO(3); SAW; ultraviolet sensor; THIN-FILMS; DETECTORS; GAN; MECHANISM; GUIDES; GAIN;

D O I：

10.1117/1.3459938

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A UV sensor composed of a surface acoustic wave (SAW) device and a high-frequency amplifier was constructed using a Colpitts oscillator circuit. Zinc oxide (ZnO) films of SAW devices were prepared on lithium niobate substrates with various deposition temperatures to investigate their effect on the sensitivity of UV sensors. Larger grain sizes and a better chemical composition of the ZnO films were obtained at high-deposition temperatures rather than at low-deposition temperatures. An extreme frequency shift of 264 kHz and sensitivity of 0.21 kHz/(mu W/cm(2)) were obtained for the ZnO-based SAW oscillator at the deposition temperature of 400 degrees C. (c) 2010 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3459938]

引用

页数：6

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