A MEMS-based organic deformable mirror with tunable focal length

被引：1
|
作者：
Chen, Tyng-Yow [1 ]
Li, Chao-Hu [1 ]
Wang, Jen-Liang [1 ]
Chiu, Chen-Wei E. [1 ]
Su, Guo-Dung J. [1 ]
机构：
[1] Natl Taiwan Univ, Grad Inst Electroopt Engn, Taipei 10617, Taiwan
来源：
2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年
关键词：
optical MEMS; deformable mirror focal length; polyimide; ADAPTIVE OPTICS; MEMBRANE;
D O I：
10.1109/OMEMS.2007.4373861
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we present a deformable mirror with circular membrane combined with single transparent electrode which can used as concave or convex mirrors. The membrane is made by organic material to achieve large deformation is actuated by electrostatic force. The mirror's focal length is adjustable by tuning the applied voltage. The beam diameter can be shrunk to 1/3 of original diameter when the focal length is adjusted to 87mm. The fabrication process, minor's tunable range, and experiment result will be discussed in this article.
引用
收藏
页码：103 / 104
页数：2
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