Effect of UV irradiation on the kinetics of annealing-induced phase transformations in Ti/Si, V/Si, and Zr/Si heterostructures

被引：1
|
作者：
Nuprienok, IS [1 ]
Shibko, AN [1 ]
机构：
[1] Byelarussian Acad Sci, Inst Elect, Minsk 220841, BELARUS
来源：
INORGANIC MATERIALS | 2003年 / 39卷 / 11期
关键词：
Oxide; Inorganic Chemistry; Phase Transformation; Metal Oxide; Electrical Property;
D O I：
10.1023/A:1027397425198
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The effect of irradiation at lambda = 312.5, 365.0, and 552.0 nm on annealing-induced phase transformations and electrical properties of Ti/Si, V/Si, and Zr/Si heterostructures is studied. The results demonstrate that irradiation at these wavelengths during annealing offers the possibility of obtaining different metal oxides and silicides, depending on the treatment conditions.
引用
收藏
页码：1154 / 1157
页数：4
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