Small low-frequency noise IGZO TFTs using a bilayer HfO2/SiO2 dielectric and the applications of IGZO TFTs to biosensors

被引：0
|
作者：
Sui, Liang-Yu [1 ]
Lin, Hsin-Ying [1 ]
Lin, Huang-Kai [1 ]
Huang, Jian-Jang [1 ,2 ]
机构：
[1] Natl Taiwan Univ, Grad Inst Photon & Optoelect, Taipei 106, Taiwan
[2] Natl Taiwan Univ, Dept Elect Engn, Taipei 106, Taiwan
来源：
2013 IEEE INTERNATIONAL CONFERENCE OF ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC) | 2013年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页数：2
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