Low-loss 1x2 MEMS optical switch with three degree-of-freedom actuation

被引：0

作者：

Lee, HW ^{[1
]}

Wu, WY ^{[1
]}

Shi, ZC ^{[1
]}

Guo, WZ ^{[1
]}

Lee, YH ^{[1
]}

机构：

[1] Ind Technol Res Inst, Optoelect & Syst Labs, Chutung 310, Taiwan

来源：

2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2003年

关键词：

D O I：

10.1109/OMEMS.2003.1233501

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A low-loss 1x2 MEMS optical switch with novel three-degree-of-freedom actuator is demonstrated. The actuator can achieve in-plane, out-of-plane, and rotational motion. Therefore, low-loss switching performance can be obtained through these flexible fine adjustments. 0.6 dB insertion loss with long-term repeatability as low as +/-0.04 dB is demonstrated for over one million cycles, and switching speed as fast as 0.8 ms is achieved with 5-V drive.

引用

页码：131 / 132

页数：2

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