Apertureless near-field optical microscope in reflection and transmission modes

被引：6
|
作者：
Laddada, R [1 ]
Adam, PM [1 ]
Royer, P [1 ]
Bijeon, JL [1 ]
机构：
[1] Univ Technol Troyes, Nanotechnol & Opt Instrumentat Lab, F-10010 Troyes, France
来源：
OPTICAL ENGINEERING | 1998年 / 37卷 / 07期
关键词：
near-field optics; SNOM (Scanning Near-field Optical Microscopy); AFM (Atomic Force Microscopy); LPM (Local Probe Microscopy);
D O I：
10.1117/1.601720
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Apertureless Scanning Near-field Optical Microscope (SNOM) receives an increasing interest in local imaging and analysis. We report a hybrid microscope composed of a commercial Atomic Force Microscope (AFM) and an apertureless SNOM, which operates both in reflection and transmission modes with several illumination and collection systems. The optical probe is a commercial AFM tip integrated on a silicon cantilever. The AFM is operated in the intermittent contact mode at the resonance frequency of the cantilever. We present the images obtained on a grating of cylindrical dots of aluminum (diameter is 200 nm, height is 20 nm) and we show the effects of some optical parameters (polarization, direction of illumination and collection) on the SNOM images. (C) 1998 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码：2142 / 2147
页数：6
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