Variability Effects in Nanowire and Macaroni MOSFETs-Part II: Random Telegraph Noise

被引:7
|
作者
Spinelli, Alessandro S. [1 ]
Compagnoni, Christian [1 ]
Lacaita, Andrea L. [1 ]
机构
[1] Politecn Milan, Dipartimento Elettron Informaz & Bioingn, I-20133 Milan, Italy
关键词
Doping; Electron traps; MOSFET; Silicon; Nanoscale devices; Threshold voltage; Resource description framework; Macaroni MOSFET; nanowire (NW) MOSFET; random telegraph noise (RTN); variability; FLASH MEMORIES; SI GATE; MODEL; PERFORMANCE; DEVICES; IMPACT;
D O I
10.1109/TED.2020.2976630
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this article and in its Part I, we investigate variability effects on the threshold voltage of nanowire (NW) and Macaroni devices, focusing on random dopant fluctuations and random telegraph noise (RTN) and assessing their dependencies on device radius, channel length, and doping. In this article, we address variability induced by RTN, showing that the slope of the exponential distribution follows different dependencies with respect to planar devices. We highlight the strong sensitivity of the Macaroni devices to traps at the filler-oxide interface, discussing the dependence. Finally, accumulation-mode devices are addressed, showing that they allow to achieve a lower RTN in NWs but a worse one in the Macaroni devices.
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页码:1492 / 1497
页数:6
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