Application of Electro Optical Terahertz Pulse Reflectometry for Fault Localization and Defect Analysis

被引：0

作者：

Lin, Yi-Sheng ^{[1
]}

Hsiao, Yu-Hsiang ^{[1
]}

Lee, Shu-Hua ^{[1
]}

机构：

[1] Adv Semicond Engn Inc, Prod Characterizat, Kaohsiung, Taiwan

来源：

ISTFA 2017: CONFERENCE PROCEEDINGS FROM THE 43RD INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS | 2017年

关键词：

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

Electro Optical Terahertz Pulse Reflectometry (EOTPR) is an E-FA (Electrical Failure Analysis) technique in the semiconductor industry for non-destructive electrical fault isolation for shorts, leakages and opens. This paper introduces the capability and presents several case studies identifying the physical location of defects where EOTPR is useful as a non-destructive analysis technique. In this paper, the methodology and application of EOTPR on open and short failure isolations in advanced 2.5D IC and wafer level packages (WLP) have been presented. The experimental results of P-FA (Physical Failure Analysis) verify the accuracy of the EOTPR system in determining the distance to defect.

引用

页码：25 / 35

页数：11

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