Automated system for interferometric out-of-plane and in-plane microelements measurement

被引：0
|
作者：
Kacperski, J [1 ]
Sykula, T [1 ]
Kujawinska, M [1 ]
Salbut, L [1 ]
机构：
[1] Warsaw Univ Technol, Inst Micromech & Photon, PL-00661 Warsaw, Poland
来源：
PHOTONICS APPLICATIONS IN ASTRONOMY, COMMUNICATIONS, INDUSTRY, AND HIGH-ENERGY PHYSICS EXPERIMENTS | 2003年 / 5125卷
关键词：
microelement (MEMS) testing; interferometry; grating (moire) interferometry; microloading machine; waveguide interferometer;
D O I：
10.1117/12.531537
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The automated system for microelement testing, which consists of Twyman-Green interferometer and waveguide grating interferometer integrated with optical microscope is presented. The microscope is additionally equipped with mechanisms to fix, microposition and load a specimen under study. Full-field analysis of out-of-plane and in-plane displacements of microelements is performed at this study. The applicability of the system is proven by performing tests of silicon membrane and silicon beam.
引用
收藏
页码：427 / 433
页数：7
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