Introduction of InP-based light emitter into GaAs-based 3D photonic crystal by improved wafer bonding of dissimilar materials

被引:0
|
作者
Imada, M [1 ]
Ogawa, S [1 ]
Yoshimoto, S [1 ]
Noda, S [1 ]
机构
[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6158510, Japan
关键词
optical material; photonic crystal; thermal stress; wafer bonding;
D O I
暂无
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We developed improved wafer-bonding techniques for dissimilar materials in order to introduce an InP-based light emitter into a GaAs-based three-dimensional (3D) photonic crystal (PC). Observation of the GaAs/InGaAsP-bonding interface by scanning acoustic microscopy revealed that debonding occurred at approximately 300 degrees C due to the differing thermal expansion coefficients of GaAs and InP. We calculated thermal stress using a 2D finite-element method and found that it could be reduced by thinning the InP substrate. These results were used to successfully develop a 3D PC incorporating a multiple quantum-well light-emitting structure and artificial defects. Photolunimescence measurements revealed that spontaneous emission within the PC region was reduced due to the complete photonic band gap, while strong emission due to the defect state was observed only within the defect region. These results are important steps towards the realization of novel light-sources, such as zero-threshold lasers, using 3D PCs.
引用
收藏
页码:343 / 353
页数:11
相关论文
共 50 条
  • [41] The impact of incident wave angle and air hole radius parameter on the optical responses of a GaAs-based 2D photonic crystal, using the FDFD method
    Bahou, Y.
    Bihi, A. N.
    Oualim, E. M.
    INDIAN JOURNAL OF PHYSICS, 2024, 98 (07) : 2539 - 2547
  • [42] Plasma Assisted Multichip-to-Wafer Direct Bonding Technology for Self-Assembly Based 3D Integration
    Hashiguchi, H.
    Yonekura, H.
    Fukushima, T.
    Murugesan, M.
    Kino, H.
    Lee, K. -W.
    Tanaka, T.
    Koyanagi, M.
    2015 IEEE 65TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2015, : 1458 - 1463
  • [43] Preparation and Properties of Functional Materials Based on Digital Light Processing 3D Printing
    Deng, Weiping
    Xie, Deqiao
    Liu, Fuxi
    Shen, Lida
    Tian, Zongjun
    Yang, Yang
    JOURNAL OF NANOMATERIALS, 2022, 2022
  • [44] New wood-based panel with imprinted 3D surface pattern and improved internal bonding
    Klimek, Petr
    Wimmer, Rupert
    Riegler, Martin
    EUROPEAN JOURNAL OF WOOD AND WOOD PRODUCTS, 2017, 75 (03) : 375 - 383
  • [45] New wood-based panel with imprinted 3D surface pattern and improved internal bonding
    Petr Klímek
    Rupert Wimmer
    Martin Riegler
    European Journal of Wood and Wood Products, 2017, 75 : 375 - 383
  • [46] Reliability and structural design of a wafer-level 3D integration scheme with W TSVs based on Cu-oxide hybrid wafer bonding
    Chen, K. N.
    Shaw, T. M.
    Cabral, C., Jr.
    Zuo, G.
    2010 INTERNATIONAL ELECTRON DEVICES MEETING - TECHNICAL DIGEST, 2010,
  • [47] 3D printed low-loss THz waveguide based on Kagome photonic crystal structure
    Yang, Jing
    Zhao, Jiayu
    Gong, Cheng
    Tian, Haolin
    Sun, Lu
    Chen, Ping
    Lin, Lie
    Liu, Weiwei
    OPTICS EXPRESS, 2016, 24 (20): : 22454 - 22460
  • [48] Two-dimensional diffraefive optical element based fabrication of 3D photonic crystal templates
    Chanda, Debashis
    Herman, Peter R.
    PHOTONIC CRYSTAL MATERIALS AND DEVICES VI, 2007, 6480
  • [49] Fabrication of fully undercut ZnO-based photonic crystal membranes with 3D optical confinement
    Hoffmann, Sandro Phil
    Albert, Maximilian
    Meier, Cedrik
    SUPERLATTICES AND MICROSTRUCTURES, 2016, 97 : 397 - 408
  • [50] Low cost 3D microfluidic chips for multiplex protein detection based on photonic crystal beads
    Chang, Ning
    Zhai, Jingyan
    Liu, Bing
    Zhou, Jiping
    Zeng, Zhaoyu
    Zhao, Xiangwei
    LAB ON A CHIP, 2018, 18 (23) : 3638 - 3644