A Novel Single-Excitation Capacitive Angular Position Sensor Design

被引:32
|
作者
Hou, Bo [1 ]
Zhou, Bin [1 ]
Song, Mingliang [1 ]
Lin, Zhihui [1 ]
Zhang, Rong [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instrument, Engn Res Ctr Nav Technol, Beijing 100084, Peoples R China
基金
美国国家科学基金会;
关键词
angular position sensor; capacitance sensitive; single-excitation; sinusoidal circular electrodes; amplitude modulation;
D O I
10.3390/s16081196
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This paper presents a high-precision capacitive angular position sensor (CAPS). The CAPS is designed to be excited by a single voltage to eliminate the matching errors of multi-excitations, and it is mainly composed of excitation electrodes, coupling electrodes, petal-form sensitive electrodes and a set of collection electrodes. A sinusoidal voltage is applied on the excitation electrodes, then the voltage couples to the coupling electrodes and sensitive electrodes without contact. The sensitive electrodes together with the set of collection electrodes encode the angular position to amplitude-modulated signals, and in order to increase the scale factor, the sensitive electrodes are patterned in the shape of petal-form sinusoidal circles. By utilizing a resolver demodulation method, the amplitude-modulated signals are digitally decoded to get the angular position. A prototype of the CAPS is fabricated and tested. The measurement results show that the accuracy of the sensor is 0.0036 degrees, the resolution is 0.0009 degrees and the nonlinearity over the full range is 0.008 degrees (after compensation), indicating that the CAPS has great potential to be applied in high-precision applications with a low cost.
引用
收藏
页数:16
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