Electronic micro-fabrication of chalcogenide glass

被引：0
|
作者：
Tanaka, K
机构：
来源：
PHYSICS AND APPLICATIONS OF NON-CRYSTALLINE SEMICONDUCTORS IN OPTOELECTRONICS | 1997年 / 36卷
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D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Micrometer-scale deformations can be produced in chalcogenide glasses only by exposure to laser or electron beams. The deformations are assumed to be induced through electronic (athermal) processes. while the details depend upon materials and exposure beams.
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页码：31 / 44
页数：14
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