Chromatography of bis-(3-sulfopropyl) disulfide and its breakdown products by HPLC coupled with electrochemical detection

被引:7
|
作者
Volov, Igor [1 ]
Mann, Olivier [2 ]
Hoenersch, Yvonne [2 ]
Wahl, Bjoern [2 ]
West, Alan C. [1 ]
机构
[1] Columbia Univ, Dept Chem Engn, New York, NY 10024 USA
[2] Atotech Deutschland GmbH, Berlin, Germany
关键词
Bis-(3-sulfopropyl) disulfide; Copper; Electrodeposition; HPLC; 3-Mercaptopropyl sulfonate; COPPER ELECTROPLATING BATH; ELECTRODEPOSITION; ADDITIVES; SPS; CHEMISTRY; ACID; DECOMPOSITION; BRIGHTENER; CHLORIDE;
D O I
10.1002/jssc.201100352
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A chromatographic method for the detection of bis-(3-sulfopropyl) disulfide (SPS), a common additive in acidic copper plating baths, and its breakdown products is demonstrated. The detection scheme involves a combination of solid-phase extraction for sample pre-treatment, C-18 reversed-phase high-performance liquid chromatography column for separation, and electrochemical sensor for detection of all non-fully oxidized sulfur-containing compounds. We were able to achieve an effective separation and accurately assign chromatographic peaks to all detectable species. Owing to a high sensitivity of the utilized electrochemical detector, detection in low parts per billion range was possible. This can prove crucial for plating bath control, since minute amounts of certain by-products significantly affect the bath performance.
引用
收藏
页码:2385 / 2390
页数:6
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